TKF過濾器ST-H系列技術參數
Removal Rating | ≥ 0.0025μm |
Retention | Greater than 99.9999999% Removal of all particles down to 0.0025μm |
Rated Flow @ 109 | 150 SLPM (Max 200 SLPM) |
Materials | Filter element / Support / O-ring PTFE / PFA / PTFE |
Operating Conditions | Maximum inlet pressure 0.98 MPa (10kgf/cm2) at 20°C |
Helium Leak Rating | 1 x 10-9 atm·cc/sec |
Surface Finish Interior | ≤ Ra 5μinch |
TKF過濾器ST-H系列產品介紹
超高純度最大直列氣體過濾器
全氟聚合物濾芯
電拋光316L不銹鋼外殼
PTFE 元件具有出色的耐腐蝕性和與大多數高純度半導體工藝氣體的良好兼容性
3 納米顆粒過濾能力保持高流動效率和低壓降
5Ra電拋光表面可防止內部污染
去離子水清洗后用熱氮氣烘烤，以滿足半導體工藝標準
100級制造、清潔和包裝環(huán)境
100% 氦氣泄漏測試
Ultra-high purity Max in-line gas filter
Perfluoropolymer filter element
Electropolished 316L stainless steel housing
PTFE element offers excellent corrosion resistance and good compatibility with most high purity semiconductor process gases
3 nanometer particle filtration capability maintains high flow efficiency and low pressure drop
5Ra electropolished surface prevents internal contamination
Deionized water rinsed followed by hot nitrogen bakeout to meet semiconductor process standards
Class 100 manufacturing, cleaning and packaging environment
100% helium leak tested
TKF過濾器ST-H系列規(guī)格尺寸
TKF過濾器ST-H系列其他常用型號：
TKF ST-H150-4VM
TKF ST-H150-4SW
TKF ST-H300-6VM
TKF ST-H300-6SW
TKF ST-H300-8SW
TKF ST-H300-8VM
TKF Filters NEW + ORIGINAL+ ONE YEAR WARRANTY
愛澤工業(yè)成立于2010年，定位于向先進制造工業(yè)提供高端制造技術和設備。代理經營世界先進的電氣自動化、機械與傳動、流體控制、儀器儀表、工具等產品。作為電氣，液壓以及氣動解決方案的合作伙伴，我們利用我們的全球協作團隊，為客戶提供先進解決方案，市場知識以及相關增值服務來幫助優(yōu)化客戶的工作效率，提高可靠性和安全性，致力于成為工業(yè)產品和解決方案的優(yōu)質渠道。
如果有任何關于TKF過濾器ST-H300-8VM的疑問，請隨時與我們溝通（021-31006702）。我們將盡全力解決您的問題。
If you have any question for TKF products, please feel free to dial 0086-21-3100 6702/ send request email to [email protected] / browse our website:www.aalatcr.cn.
TKF過濾器ST-H系列ST-H300-8VM技術參數及介紹
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